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nanoX - high speed positioner

piezosystem jena`s new nano-positioning stages of the series nanoX work in a bidirectional active manner. Hence, these elements are well equipped for fast dynamic applications combined with an excellent guiding accuracy even at high mass loads.
What does this mean? Due to the inability of the smca (stacked multilayer ceramic actuator) to generate pull forces, state-of-the-art piezoelectric driven nanopositioning actuators show different kinds of behavior depending on the sense of direction of their stroke. Hence, the resulting forces in the push direction are determined by the high force generation of the actively controlled scma. The pull force is determined by the weak spring reset force of the passive acting flexure hinges. Both result in a push/pull-force ratio of up to 10. The dynamical performance, load capacity and robustness of the whole nanopositioning assembly are limited by the behavior of the weaker sense of direction.
Psj’s new sophisticated gear design operates in a bidirectional active manner which reduces the push/pull-force ratio to up to approx. 1:1 (without affecting the trajectory). Both stroke vectors of the nanopositioning stage are controlled by the high pressure force generation of the smca´s.

This mechanical design features:
  • the most efficient way to change the smca forces into translation power
  • an outstanding damping ability of actively controlled acceleration and deceleration
  • high inertial preload; a high degree of mechanical resistance against shocking overloads
  • minimized failure rate caused by the absence of destructive pull forces acting on the smca
  • excellent temperature compensation

You need more information or have any questions - please conatct us.