Piezo Syteme Jena

rotary stage

• rotary stroke up to 9 mrad / 11 mrad
• high dynamical performance
• high planar behavior
• well centered, defined axis of rotation 0,2 µrad / 0,02 µrad resolution
• 3mm free aperture
• integrated temperature compensation

applications:

• fast scanning
• lithography
• laser beam steering …

The ROTOR 10 and the ROTOR 10 SG one axis low voltage rotary stage is a development within our ultra-fast ROTOR-line. It provides a long steering and scanning range of up to 11mrad.
The well defined axis of rotation is located centrically.
An incorporated free aperture allows axial beam applications also.

Due to FEA-optimization of these stages you can meet the highest dynamical performance and high planar guiding accuracy. This is accomplished even with high mass loads in a compact package.
Our optimization also incorporates excellent temperature compensation properties for the stage.

The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction - a feature provided by all psj-stages.

data sheet ROTOR 10

drawing ROTOR 10
drawing ROTOR 10 VAC
drawing ROTOR 10 SG
drawing ROTOR 10 SG VAC

notes for handling