This series of ultra-fast XY scanners was especially developed for fast, and the precise movement of optical components, and mechanical parts (e.g. lenses, mirrors, and cantilevers).
They can provide a positioning/scanning range up to 200microns. The centrically located free aperture is excellent for optical applications, such as: lens scanning.
Using FEA-optimization these systems show the highest dynamical performance as well as excellent guiding accuracy.
Another key feature is the stiffness in the z-axis. Our systems offer the highest stiffness when compared with other scanners available on the market today. This is accomplished even when using high mass loads in a compact package.
All of our XY scanner systems can be designed for OEM applications. Modification and optimisation can be done upon request.
They can provide a positioning/scanning range up to 200microns. The centrically located free aperture is excellent for optical applications, such as: lens scanning.
Using FEA-optimization these systems show the highest dynamical performance as well as excellent guiding accuracy.
Another key feature is the stiffness in the z-axis. Our systems offer the highest stiffness when compared with other scanners available on the market today. This is accomplished even when using high mass loads in a compact package.
All of our XY scanner systems can be designed for OEM applications. Modification and optimisation can be done upon request.
- linear stroke up to 200microns
- z-axis movement available
- highest dynamical performance
- highest stiffness
- excellent guidance accuracy
- up to 0,4nm resolution
-
vacuum and cryogenic version
- fast scanning and positioning
- lens positioning
-
beam alignment
- surface scanning
