For special applications, the element can be optimized for minimum deviation in z-direction while moving in x- and y- direction (part no. S-605-30).
The optional elements PZ 8 D12 and PZ 20 D12 complement the PXY D12 elements with a motion of 8µm or 20µm in z-direction. These elements can be equiped with positioning feed back sensor for closed loop controle. Vacuum and cryogenic versions available as well.
- motion up to 200µm in x- and y-direction
- high resonant frequency
- element for z-motion
- positioning sensor for feed back control
- option: optimization for minimum noise in z-direction
