- motion up to 100 µm
- maximum load 3500 N
- very high stiffness up to 200 N/µm
- voltage -10...150V (multilayer)
- sub nm-resolution
- msec response time
- flexible epoxy insulation
- metal housing
Because of their high blocking forces, the PHL series piezo actuators are ideally suited for applications in the machine tool industry. This feature enables the PHL series to move a large mass and to generate high external loads.
These actuators are not pre-loaded but can withstand medium pressure forces.
The piezo actuator stack is encased in a non-magnetic stainless steel housing with the top and bottom epoxied to eliminate mechanical play.
The series PHL provides a response time in the millisecond range with sub-nm resolution.
Piezo actuators without pre-load are not suitable for dynamic applications.
For dynamic applications please choose series PAHL.
applications:
- automation
- semiconductor
- optic machinery tools
- laser and mirror movement
