- motion up to 200 µm
- sub nm-resolution
- maximum load 3500 N
- high stiffness up to 200 N/µm
- tensile forces typ. > 350 N
- high dynamic properties
- msec response time
- max. voltage 150 V (multilayer)
- option: positioning feed back sensor for closed loop control
- flexible Epoxy insulation
The PAHL series of actuators are internally pre-loaded by a mechanical spring, making them ideal for dynamic applications.
The ability to generate a large force and be subjected to high mass loading make them particularly useful for machine tools and dynamic scanning systems.
As an option, these actuators are available with strain gauges. This option provides the accuracy to < 0.5%.
A note on mounting these actuators:
Actuators are normally fastened with screws or clamps to the bottom plate. If the top plate has a torque nut, it should be used when securing screws in order to avoid damage to the actuator.
Please avoid tensile forces greater than the given pre-load!
applications:
- mirror shifting
- semiconductor
- metrology
- micro injection
- nanopositioning
