piezo slit system
applications:
Two slit edges are driven by only one piezo - electric actuator. For the construction of this piezo slit element, solid state flexure hinges with parallelogram design are used.
This ensures that the movement of the the slit edges remains synchronized with respect to the center line.
To avoid hysteresis, creep and temperature effects, the piezo - electric slit can be equipped with a strain gauge measurement system. The position accuracy of the piezo slit with integrated measurement system is typically 0.1% or better.
Also, piezo slit elements with either steel slit edges are available.
Basically, all PZS - Elements are available in UHV -compatible versions and with different body and slit edges materials (INVAR).
- symmetrical motion of two slit edges
- driven by only one piezo actuator
- opening up to 1500 µm
- nm - precise resolution
- vacuum compatible version
- optional measurement system
applications:
- optics
- spectroscopy
- vacuum systems
- optical switches
- shutters and scanners
Two slit edges are driven by only one piezo - electric actuator. For the construction of this piezo slit element, solid state flexure hinges with parallelogram design are used.
This ensures that the movement of the the slit edges remains synchronized with respect to the center line.
To avoid hysteresis, creep and temperature effects, the piezo - electric slit can be equipped with a strain gauge measurement system. The position accuracy of the piezo slit with integrated measurement system is typically 0.1% or better.
Also, piezo slit elements with either steel slit edges are available.
Basically, all PZS - Elements are available in UHV -compatible versions and with different body and slit edges materials (INVAR).
