high speed positioner
The series nanoX200 one axis low voltage linear stage is a development within our ultra-fast nanoX line. It provides a positioning and scanning range up to 240microns.
The centrally located free aperture allows laser optical applications through the stage. This is also possible when stacking them in an XY configuration. Due to FEA-optimization of these stages, you meet the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package.
Our optimization also incorporates excellent temperature compensation properties for the trajectory of the stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction - a feature of all psj-stages.
Please note: based on a solid-state phenomena, piezoactuators generate pressure forces to affect the leverage geared motion. The ceramic’s extension is nearly linear to the applied electric field, but hysteresis and creep still exists. Piezoelectric geared devices are neither affect by magnetic fields nor do they produce them. At cryogenic environment they function down to almost zero Kelvin. This low temperature is associated with a linear decreasing extension behavior. In vacuum conditions, piezo actuators can be used at pressures below 10Pa.
Because of the greatly reduced dielectric breakdown strength of air they should not be operated in the pressure range from 10Pa up to 10kPa. To avoid creep and hysteresis, the nanoX 200SG / 200CAP is equipped with a high resolution measurement sensor.
In combination with the psj-controller in closed loop operation high stability, linearity, repeatability and accuracy are achieved. The compact design and the raster pin and drill holes for mounting allow an easy integration of the nanoX in your existing assembly.
Vacuum and cryogenic versions are available on demand as well as body material variations of invar, superinvar, aluminum or titanium.
Recommended Controller:
Analog: Controller series ENV (ENV40nanoX, ENV300 nanoX, ENV 800nanoX)
Digital: digital controller series d-Drive
If you wish to receive further information for this product please use our contact form or send an email to : sales@piezojena.com
series nanoX 200

data sheet nanoX 200 (
drawing nanoX 200 (
drawing nanoX 200 SG (
drawing nanoX 200 CAP (
notes for mounting (
