- linear motion up to 400µm
- excellent guidance accuracy
- 5N stiffness in z-axis
- 0.6nm resolution
- 3kHz resonant frequency
The newly designed stages of the series nanoSX combine the high accuracy and
the high speed of a piezo positioning system with a special actuating design
for long travel motion. Furthermore the height of the stage is only 10mm with a
free center space of 12.5mm! Outside dimensions are only 60x60mm.The ultra flat design of the stage and the ease with which you can combine the stage to an xy scanning system makes the system especially useful for a wide variety of applications.
Based on the unique piezojena bi-directional actuating nanoX design, this series is designed to move high load masses with a resolution of 0.6nm.
The nanoX design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.
The stages can be equipped with a high resolution feed back system for closed loop control.
Fields of application are high resolution metrology, x and xy scanning and dynamic positioning.
The stages are available in a cryogenic and vacuum version as well.
If you wish to receive further information for this product please use our contact form or send an email to : sales@piezojena.com
