- plus-minus tilting in two dimensions
- tilt up to +/- 4mrad
- high resolution
- high resonant frequency
- central pivot point
- integrated sensor system upon request
- appropriate for vacuum applications
- OEM-version available
application examples:
- scanner
- cameras / opticals systems
- mirror tilting
- image stabilization
- laser beam stabilization
The PSH tilting systems PSH 10/2 and PSH 5/2 consist of 4 piezoelectric actuators (always 2 stacks for one axis, controlled in conjunction with each other). These actuators provide tilt to the top plate on 2 rectangular axes. Their construction is temperature compensated: changes in surrounding temperature do not affect the tilting angle.
The tilting stage is designed for a "plus-minus tilting". Mirror mounts are pre-loaded, thus they are well suited for dynamic applications.
The high resonant frequency of the stage also allows for excellent dynamic operation. For closed loop application integrated a strain gauge measurement system is available.
