- ±7.5mrad, resp. ± 15mrad tilting angle
- high step resolution (0.03µrad)
- excellent guidance accuracy
- ± tilting
- 1" mirror mounting area
applications:
- precision beam alignment
- optics
- laser technology
- lithography
- metrology and
- printing industry
The mirror tilting system PSH 15/1 and PSH 30/1 of the series PSH have been developed for the fast and precise positioning of optical mirrors.
The FEM-calculated systems have been especially developed for 1"-components.
These systems are based on piezosystem jena´s approved nanoX®-design. This sophisticated gear design of the series nanoSX and nanoX® stands out with its bi-directional actuation and features an active push/pull-force.
Basic feature of these high performance piezo actuators is the very high stiffness and the resonance frequency. - So even high loads can be moved in a highly dynamic manner.
The bi-directional gear design makes the system very robust and makes it non-sensitive against external forces.
The components which are to be moved can be clued directly on the top plate and can be mounted using an adapter plate respectively.

