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micrometer screw drive

MICI 80 / 140 / 180
  • motion up to 180 µm
  • high resonant frequency
  • parallelogram construction
  • additional mass up to 20 kg

applications:
  • quality control
  • automation
  • fine adjustment of optical components
  • mikro-assembly

This element was originally developed for quality control in the optical industry – it consists of a piezostage in combination with a micrometer drive.

The user can first adjust the position of the actuator and then fine-tune this position with the aid of the piezostage.
The resolution is in the nm and sub-nm range.

Because of the very robust construction of the element, an additional mass of up to 20 kg can be lifted.