- motion up to 180 µm
- high resonant frequency
- parallelogram construction
- additional mass up to 20 kg
applications:
- quality control
- automation
- fine adjustment of optical components
- mikro-assembly
This element was originally developed for quality control in the optical industry – it consists of a piezostage in combination with a micrometer drive.
The user can first adjust the position of the actuator and then fine-tune this position with the aid of the piezostage.
The resolution is in the nm and sub-nm range.
Because of the very robust construction of the element, an additional mass of up to 20 kg can be lifted.
