nano positioning and nano measuring machine

The Nano Positioning and Nano Measuring Machine is used for the three-dimensional coordinate measurement in a range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. Its unique sensor arrangement provides Abbe error-free measurements on all three coordinate axes. The measurement axes of three minia-ture plane mirror interferometers for length measurements inter-sect with the contacting point of the probe sensor with the measuring object at a single point. The measuring object is placed directly on a movable mirror corner. The position of this mirror corner is monitored by the three fixed miniature interferometers. The mirror corner is positioned by a three axis electrodynamic driving system. Any angular devia-tions during the positioning process are measured and corrected by two angle sensors.The light of three stabilized lasers are guided from the electronics unit to the interferometer heads by fiberoptic lightguides, providing a compact, thermally stable set-up of the Nano Positioning and Nano Measuring Machine. The heart of its electronics unit is a digital signal processor (DSP) that processes all incoming signals, controls its driving system and governs the course of measurement procedures.

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