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miniature double plane mirror interferometer

Our Series SP-D double plane mirror interferometers are de-signed for incorporation into customer-supplied systems, and are used for simultaneously making pairs of nanoprecision length measurements. The differences in these pairs of length measurements and the separations between their two beams are then used for accurately determining the associated angles involved, where the angular measurement range is approxi-mately two minutes of arc and independent of beam separation. In cases involving small length changes, focusing their external beams on the objects being measured allows to increase the angular measurement range to ± 30 minutes of arc.Their laser light sources are coupled to their sensor heads via fiberoptic cables. Their miniature interferometers convert mo-tions of their moving mirrors into pairs of optical interference signals that are transmitted to their electronic power supply/ signal processing modules for processing. Their He-Ne- lasers, which are frequency stabilized on models designed for making longer length measurements, along with corrections for envi-ronmental shifts in laser wavelength, provide the basis for their high metric precision. A PC running custom software package is employed for operating their electronics modules and displaying measurement results.

For more information from SIOS...

Contact: : usa@piezojena.com




Data sheet download

Miniature Double Plane Mirror Interferometer (116.99 kb)